Planar silicon target Materials:Si Grain Size:<100um Oxygen Nitrogen content:<600ppm Photos: How to choose Si target ? The silicon target sprayed by air is not called silicon target, but silicon nitride target. The composition inside is complex, including silicon oxide, silicon nitride and silicon nitride. Because silicon reacts violently with nitrogen and oxygen in the air in the high temperature flame flow, compounds are formed. Vacuum spraying ensures the original composition of silicon, and no nitrogen and oxygen are involved in the reaction. Therefore, optical coating can be used to deposit ideal SiO2 or SiN films after adding oxygen or nitrogen to the coating film. We can promise our Si target processed in vacuum condition,although it may have a higher cost,but i think the best property for coating will get the best coating performance. We also can supply Silicon rotatary target. Link other sputtering target: